منابع مشابه
SU-8 Guiding Layer for Love Wave Devices
SU-8 is a technologically important photoresist used extensively for thefabrication of microfluidics and MEMS, allowing high aspect ratio structures to beproduced. In this work we report the use of SU-8 as a Love wave sensor guiding layerwhich allows the possibility of integrating a guiding layer with flow cell during fabrication.Devices were fabricated on ST-cut quartz substrates with a single...
متن کاملA Love Wave Reflective Delay Line with Polymer Guiding Layer for Wireless Sensor Application
This paper presents an optimal design for a Love wave reflective delay line on 41o YX LiNbO₃ with a polymer guiding layer for wireless sensor applications. A theoretical model was established to describe the Love wave propagation along the larger piezoelectric substrate with polymer waveguide, and the lossy mechanism from the viscoelastic waveguide was discussed, which results in the optimal gu...
متن کاملStudying Electromagnetic Wave-guiding and Resonating Devices
Various electromagnetic wave-guiding and resonating structures are studied. The structures in question are rather complicated and thus, significant part of the used analysis methods are numerical. Numerical field computation is based on finite-difference method (FD) or on finite-difference time-domain method (FDTD). When possible, analytical methods have been used, often in conjunction with num...
متن کاملFabrication of multi-layer SU-8 microstructures
The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...
متن کاملInfluence of the Imperfect Interface on Love-Type Mechanical Wave in a FGPM Layer
In this study, we consider the propagation of the Love-type wave in piezoelectric gradient covering layer on an elastic half-space having an imperfect interface between them. Dispersion relation has been obtained in the form of determinant for both electrically open and short cases. The effects of different material gradient coefficients of functionally graded piezoelectric material (FGPM) and ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2007
ISSN: 1424-8220
DOI: 10.3390/s71102539